Inventor
BELYAEV ALEXANDER
US13 patents
⚠️ This page may combine multiple inventors who share the name “BELYAEV ALEXANDER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR TECH CORP
4 patentsUS7607647B2Oct 27, 2009
Stabilizing a substrate using a vacuum preload air bearing chuck
KLA TENCOR TECH CORP96 citations95
US7528944B2May 5, 2009
Methods and systems for detecting pinholes in a film formed on a wafer or for monitoring a thermal process tool
KLA TENCOR TECH CORP28 citations91
US7554656B2Jun 30, 2009
Methods and systems for inspection of a wafer
KLA TENCOR TECH CORP11 citations83
US7436505B2Oct 14, 2008
Computer-implemented methods and systems for determining a configuration for a light scattering inspection system
KLA TENCOR TECH CORP12 citations80