Inventor

RUNYON J REX

US2 patents

⚠️ This page may combine multiple inventors who share the name “RUNYON J REX”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

1 patent

US9311698B2Apr 12, 2016

Detecting defects on a wafer using template image matching

KLA TENCOR CORP12 citations78

DOYLE PAUL

1 patent

US8817250B2Aug 26, 2014

Air bearing for substrate inspection device

DOYLE PAUL6 citations69