Inventor
WOLTERS CHRISTIAN H
US11 patents
⚠️ This page may combine multiple inventors who share the name “WOLTERS CHRISTIAN H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR TECH CORP
7 patentsUS7607647B2Oct 27, 2009
Stabilizing a substrate using a vacuum preload air bearing chuck
KLA TENCOR TECH CORP96 citations95
US7436508B2Oct 14, 2008
Systems, circuits and methods for reducing thermal damage and extending the detection range of an inspection system
KLA TENCOR TECH CORP16 citations92
US7671982B2Mar 2, 2010
Systems, circuits and methods for reducing thermal damage and extending the detection range of an inspection system
KLA TENCOR TECH CORP6 citations73
US7414715B2Aug 19, 2008
Systems, circuits and methods for extending the detection range of an inspection system by avoiding detector saturation
KLA TENCOR TECH CORP8 citations72
US7777875B2Aug 17, 2010
Systems, circuits and methods for extending the detection range of an inspection system by avoiding detector saturation
KLA TENCOR TECH CORP4 citations61
US7423250B2Sep 9, 2008
Systems, circuits and methods for extending the detection range of an inspection system by avoiding circuit saturation
KLA TENCOR TECH CORP1 citations50
US7746462B2Jun 29, 2010
Inspection systems and methods for extending the detection range of an inspection system by forcing the photodetector into the non-linear range
KLA TENCOR TECH CORP0 citations49