Inventor

DANDO HOWARD W

US2 patents

⚠️ This page may combine multiple inventors who share the name “DANDO HOWARD W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR TECH CORP

1 patent

US7607647B2Oct 27, 2009

Stabilizing a substrate using a vacuum preload air bearing chuck

KLA TENCOR TECH CORP96 citations95

DOYLE PAUL

1 patent

US8817250B2Aug 26, 2014

Air bearing for substrate inspection device

DOYLE PAUL6 citations69