Inventor
LU HSIAO-TZU
TW13 patents
⚠️ This page may combine multiple inventors who share the name “LU HSIAO-TZU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LU HSIAO-TZU
5 patentsUS8707226B2Apr 22, 2014
Manipulating parameterized cell devices in a custom layout design
LU HSIAO-TZU8 citations76
US8394576B2Mar 12, 2013
Method for patterning a photosensitive layer
LU HSIAO-TZU2 citations61
US8119992B2Feb 21, 2012
System for overlay measurement in semiconductor manufacturing
LU HSIAO-TZU2 citations61
US8124323B2Feb 28, 2012
Method for patterning a photosensitive layer
LU HSIAO-TZU4 citations58
US8236579B2Aug 7, 2012
Methods and systems for lithography alignment
LU HSIAO-TZU0 citations51
TAIWAN SEMICONDUCTOR MFG
5 patentsUS7479466B2Jan 20, 2009
Method of heating semiconductor wafer to improve wafer flatness
TAIWAN SEMICONDUCTOR MFG4 citations63
US7582538B2Sep 1, 2009
Method of overlay measurement for alignment of patterns in semiconductor manufacturing
TAIWAN SEMICONDUCTOR MFG2 citations62
US8815496B2Aug 26, 2014
Method for patterning a photosensitive layer
TAIWAN SEMICONDUCTOR MFG0 citations51
US7723014B2May 25, 2010
System and method for photolithography in semiconductor manufacturing
TAIWAN SEMICONDUCTOR MFG0 citations47
US7601466B2Oct 13, 2009
System and method for photolithography in semiconductor manufacturing
TAIWAN SEMICONDUCTOR MFG0 citations46