Inventor
WANG JEAN
TW29 patents
⚠️ This page may combine multiple inventors who share the name “WANG JEAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
13 patentsUS7974728B2Jul 5, 2011
System for extraction of key process parameters from fault detection classification to enable wafer prediction
TAIWAN SEMICONDUCTOR MFG51 citations97
US7829815B2Nov 9, 2010
Adjustable electrodes and coils for plasma density distribution control
TAIWAN SEMICONDUCTOR MFG25 citations91
US7956448B2Jun 7, 2011
Stacked structures and methods of fabricating stacked structures
TAIWAN SEMICONDUCTOR MFG7 citations84
US7891536B2Feb 22, 2011
PVD target with end of service life detection capability
TAIWAN SEMICONDUCTOR MFG9 citations83
US7634325B2Dec 15, 2009
Prediction of uniformity of a wafer
TAIWAN SEMICONDUCTOR MFG12 citations83
US7332449B2Feb 19, 2008
Method for forming dual damascenes with supercritical fluid treatments
TAIWAN SEMICONDUCTOR MFG10 citations83
US7758338B2Jul 20, 2010
Substrate carrier, port apparatus and facility interface and apparatus including same
TAIWAN SEMICONDUCTOR MFG7 citations73
US7767471B2Aug 3, 2010
Auto routing for optimal uniformity control
TAIWAN SEMICONDUCTOR MFG3 citations62
US7544606B2Jun 9, 2009
Method to implement stress free polishing
TAIWAN SEMICONDUCTOR MFG2 citations62
US7851234B2Dec 14, 2010
System and method for enhanced control of copper trench sheet resistance uniformity
TAIWAN SEMICONDUCTOR MFG4 citations61
US9093447B2Jul 28, 2015
Chip on wafer bonder
TAIWAN SEMICONDUCTOR MFG0 citations52
US7951723B2May 31, 2011
Integrated etch and supercritical CO2 process and chamber design
TAIWAN SEMICONDUCTOR MFG1 citations52
US7879711B2Feb 1, 2011
Stacked structures and methods of fabricating stacked structures
TAIWAN SEMICONDUCTOR MFG0 citations52
HSIAO YI-LI
5 patentsUS8827695B2Sep 9, 2014
Wafer's ambiance control
HSIAO YI-LI14 citations83
US8109407B2Feb 7, 2012
Apparatus for storing substrates
HSIAO YI-LI14 citations83
US8276648B2Oct 2, 2012
PVD target with end of service life detection capability
HSIAO YI-LI1 citations50
US8101052B2Jan 24, 2012
Adjustable anode assembly for a substrate wet processing apparatus
HSIAO YI-LI0 citations50
US8795486B2Aug 5, 2014
PVD target with end of service life detection capability
HSIAO YI-LI0 citations40
KO FRANCIS
3 patentsUS8682466B2Mar 25, 2014
Automatic virtual metrology for semiconductor wafer result prediction
KO FRANCIS13 citations81
US8409993B2Apr 2, 2013
Method and system for controlling copper chemical mechanical polish uniformity
KO FRANCIS2 citations61
US9037279B2May 19, 2015
Clustering for prediction models in process control and for optimal dispatching
KO FRANCIS1 citations51