Inventor
KIRCHMEIER THOMAS
DE19 patents
⚠️ This page may combine multiple inventors who share the name “KIRCHMEIER THOMAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HUETTINGER ELEKTRONIK GMBH
9 patentsUS7745955B2Jun 29, 2010
RF plasma supply device
HUETTINGER ELEKTRONIK GMBH56 citations95
US7652901B2Jan 26, 2010
High frequency excitation system
HUETTINGER ELEKTRONIK GMBH79 citations95
US7705676B2Apr 27, 2010
Class D amplifier arrangement
HUETTINGER ELEKTRONIK GMBH50 citations93
US7440301B2Oct 21, 2008
High frequency excitation system
HUETTINGER ELEKTRONIK GMBH53 citations93
US7274266B2Sep 25, 2007
Radio frequency excitation arrangement
HUETTINGER ELEKTRONIK GMBH40 citations92
US7755451B2Jul 13, 2010
Directional coupler
HUETTINGER ELEKTRONIK GMBH7 citations68
US7692389B2Apr 6, 2010
Method and device for load matching
HUETTINGER ELEKTRONIK GMBH6 citations62
US8866400B2Oct 21, 2014
Plasma supply device
HUETTINGER ELEKTRONIK GMBH0 citations52
US8357874B2Jan 22, 2013
Radio frequency power supply
HUETTINGER ELEKTRONIK GMBH0 citations50
KIRCHMEIER THOMAS
7 patentsUS8421377B2Apr 16, 2013
Protecting high-frequency amplifers
KIRCHMEIER THOMAS40 citations97
US8129653B2Mar 6, 2012
Plasma supply device
KIRCHMEIER THOMAS99 citations96
US8222885B2Jul 17, 2012
Isolating a control signal source in a high frequency power supply
KIRCHMEIER THOMAS11 citations91
US8482205B2Jul 9, 2013
Driving switches of a plasma load power supply
KIRCHMEIER THOMAS9 citations90
US8643279B2Feb 4, 2014
Determining high frequency operating parameters in a plasma system
KIRCHMEIER THOMAS4 citations82
US8653405B2Feb 18, 2014
Method for operating a vacuum plasma process system
KIRCHMEIER THOMAS1 citations51
US8436543B2May 7, 2013
Plasma supply device
KIRCHMEIER THOMAS0 citations51