Inventor
CHUNG CHIA-HUNG
TW11 patents
⚠️ This page may combine multiple inventors who share the name “CHUNG CHIA-HUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
5 patentsUS11899368B2Feb 13, 2024
Manufacturing method of semiconductor device and semiconductor processing system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11454891B2Sep 27, 2022
Manufacturing method of semiconductor device and semiconductor processing system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11061333B2Jul 13, 2021
Manufacturing method of semiconductor device and semiconductor processing system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11004709B2May 11, 2021
Method for monitoring gas in wafer processing system
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations60
US10943802B2Mar 9, 2021
Photoresist bottle container
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations59
TAIWAN SEMICONDUCTOR MFG
4 patentsUS6938505B2Sep 6, 2005
Chamber wafer detection
TAIWAN SEMICONDUCTOR MFG29 citations89
US7254513B2Aug 7, 2007
Fault detection and classification (FDC) specification management apparatus and method thereof
TAIWAN SEMICONDUCTOR MFG11 citations80
US6775918B2Aug 17, 2004
Wafer cassette pod equipped with position sensing device
TAIWAN SEMICONDUCTOR MFG11 citations67
US6755602B2Jun 29, 2004
Wafer transport pod with linear door opening mechanism
TAIWAN SEMICONDUCTOR MFG2 citations52