Inventor
FAN CHEN-MEI
TW7 patents
⚠️ This page may combine multiple inventors who share the name “FAN CHEN-MEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
4 patentsUS6538237B1Mar 25, 2003
Apparatus for holding a quartz furnace
TAIWAN SEMICONDUCTOR MFG19 citations89
US6191035B1Feb 20, 2001
Recipe design to prevent tungsten (W) coating on wafer backside for those wafers with poly Si on wafer backside
TAIWAN SEMICONDUCTOR MFG13 citations71
US6252410B1Jun 26, 2001
Pico fuse open or short detector tool
TAIWAN SEMICONDUCTOR MFG6 citations59
US6742532B2Jun 1, 2004
Cleaning container and method for cleaning LP furnace thermocouple sleeves
TAIWAN SEMICONDUCTOR MFG0 citations39