Inventor

GUMPHER JOHN

US9 patents

⚠️ This page may combine multiple inventors who share the name “GUMPHER JOHN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

RUSSELL NOEL

2 patents

US8187971B2May 29, 2012

Method to alter silicide properties using GCIB treatment

RUSSELL NOEL28 citations91

US8435890B2May 7, 2013

Method to alter silicide properties using GCIB treatment

RUSSELL NOEL2 citations61

TOKYO ELECTRON LTD

2 patents

US7498270B2Mar 3, 2009

Method of forming a silicon oxynitride film with tensile stress

TOKYO ELECTRON LTD6 citations71

US7604841B2Oct 20, 2009

Method for extending time between chamber cleaning processes

TOKYO ELECTRON LTD3 citations61

GUMPHER JOHN

2 patents

US8466045B2Jun 18, 2013

Method of forming strained epitaxial carbon-doped silicon films

GUMPHER JOHN6 citations70

US8440578B2May 14, 2013

GCIB process for reducing interfacial roughness following pre-amorphization

GUMPHER JOHN2 citations58

TEL EPION INC

2 patents

US8709944B2Apr 29, 2014

Method to alter silicide properties using GCIB treatment

TEL EPION INC1 citations62

US8703607B2Apr 22, 2014

Method to alter silicide properties using GCIB treatment

TEL EPION INC1 citations62

DIP ANTHONY

1 patent

US8263474B2Sep 11, 2012

Reduced defect silicon or silicon germanium deposition in micro-features

DIP ANTHONY7 citations78