Inventor
FURUMURA YUJI
JP34 patents
⚠️ This page may combine multiple inventors who share the name “FURUMURA YUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJITSU LTD
16 patentsUS4876219AOct 24, 1989
Method of forming a heteroepitaxial semiconductor thin film using amorphous buffer layers
FUJITSU LTD52 citations96
US4855254AAug 8, 1989
Method of growing a single crystalline β-SiC layer on a silicon substrate
FUJITSU LTD71 citations95
US5231057AJul 27, 1993
Method of depositing insulating layer on underlying layer using plasma-assisted cvd process using pulse-modulated plasma
FUJITSU LTD62 citations94
US5314724AMay 24, 1994
Process for forming silicon oxide film
FUJITSU LTD605 citations93
US5518937AMay 21, 1996
Semiconductor device having a region doped to a level exceeding the solubility limit
FUJITSU LTD26 citations92
US5270224ADec 14, 1993
Method of manufacturing a semiconductor device having a region doped to a level exceeding the solubility limit
FUJITSU LTD41 citations92
US5111266AMay 5, 1992
Semiconductor device having a region doped to a level exceeding the solubility limit
FUJITSU LTD38 citations92
US5103285AApr 7, 1992
Silicon carbide barrier between silicon substrate and metal layer
FUJITSU LTD40 citations92
US4906593AMar 6, 1990
Method of producing a contact plug
FUJITSU LTD22 citations82
US5506443AApr 9, 1996
Multilayer insulating film of semiconductor device and method for forming the film
FUJITSU LTD15 citations81
US5082695AJan 21, 1992
Method of fabricating an x-ray exposure mask
FUJITSU LTD19 citations81
US5298458AMar 29, 1994
Method of forming tungsten film
FUJITSU LTD7 citations74
US5233163AAug 3, 1993
Graphite columnar heating body for semiconductor wafer heating
FUJITSU LTD14 citations74
US4509070AApr 2, 1985
Metal-insulator-semiconductor transistor device
FUJITSU LTD3 citations63
US4510177AApr 9, 1985
Method and apparatus for vapor phase deposition
FUJITSU LTD6 citations62
US5763005AJun 9, 1998
Method for forming multilayer insulating film of semiconductor device
FUJITSU LTD2 citations61
FURUMURA YUJI
13 patentsUS8237622B2Aug 7, 2012
Base sheet
FURUMURA YUJI26 citations91
US8440487B2May 14, 2013
Methods for manufacturing radio frequency (RF) powder
FURUMURA YUJI13 citations84
US8724978B2May 13, 2014
Fluid heating-cooling cylinder device
FURUMURA YUJI15 citations83
US8933784B2Jan 13, 2015
RF powder particle, RF powder, and RF powder-containing base
FURUMURA YUJI11 citations82
US8766853B2Jul 1, 2014
Method for adding RF powder and RF powder-added base sheet
FURUMURA YUJI12 citations82
US8178415B2May 15, 2012
Method for manufacturing RF powder
FURUMURA YUJI10 citations82
US8154456B2Apr 10, 2012
RF powder-containing base
FURUMURA YUJI4 citations63
US8766802B2Jul 1, 2014
Base data management system
FURUMURA YUJI2 citations61
US8318047B2Nov 27, 2012
Method for providing RF powder and RF powder-containing liquid
FURUMURA YUJI4 citations61
US8477072B2Jul 2, 2013
Radio frequency (RF) particles
FURUMURA YUJI0 citations52
US8188924B2May 29, 2012
RF powder and method for manufacturing the same
FURUMURA YUJI0 citations52
US8704202B2Apr 22, 2014
RF powder particles including an inductance element, a capacitance element, and a photovoltaic cell and method for exciting RF powder
FURUMURA YUJI0 citations51
US8686743B2Apr 1, 2014
Substrate, substrate holding apparatus, analysis apparatus, program, detection system, semiconductor device, display apparatus, and semiconductor manufacturing apparatus
FURUMURA YUJI0 citations51
PHILTECH INC
4 patentsUS9709340B2Jul 18, 2017
Fluid heat exchanging apparatus
PHILTECH INC1 citations49
US9340736B2May 17, 2016
Solid gasification apparatus
PHILTECH INC0 citations49
US9915483B2Mar 13, 2018
Fluid heat exchanging apparatus
PHILTECH INC0 citations39
US10428422B2Oct 1, 2019
Film-forming method
PHILTECH INC0 citations35