Inventor

TABATA YASUKO

JP7 patents

⚠️ This page may combine multiple inventors who share the name “TABATA YASUKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FUJITSU LTD

3 patents

US5364716ANov 15, 1994

Pattern exposing method using phase shift and mask used therefor

FUJITSU LTD116 citations97

US5472813ADec 5, 1995

Pattern exposing method using phase shift and mask used therefor

FUJITSU LTD24 citations92

US5994004ANov 30, 1999

Levenson type phase shift photomask and manufacture method of semiconductor device using such photomask

FUJITSU LTD3 citations62

PANASONIC CORP

1 patent

US8869079B2Oct 21, 2014

Semiconductor device and layout design method for the same

PANASONIC CORP6 citations84

MISAKA AKIO

1 patent

US8392856B2Mar 5, 2013

Semiconductor device and layout design method for the same

MISAKA AKIO13 citations82

WINBOND ELECTRONICS CORP

1 patent

US6791668B2Sep 14, 2004

Semiconductor manufacturing apparatus and method

WINBOND ELECTRONICS CORP3 citations61

TABATA YASUKO

1 patent

US8330248B2Dec 11, 2012

Semiconductor device, mask for fabrication of semiconductor device, and optical proximity correction method

TABATA YASUKO3 citations55