Inventor
UEMOTO ATSUSHI
JP39 patents
⚠️ This page may combine multiple inventors who share the name “UEMOTO ATSUSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH SCIENCE CORP
30 patentsUS10088401B2Oct 2, 2018
Automatic sample preparation apparatus
HITACHI HIGH TECH SCIENCE CORP14 citations92
US10677697B2Jun 9, 2020
Automatic sample preparation apparatus
HITACHI HIGH TECH SCIENCE CORP5 citations84
US9347896B2May 24, 2016
Cross-section processing-and-observation method and cross-section processing-and-observation apparatus
HITACHI HIGH TECH SCIENCE CORP8 citations84
US9275827B2Mar 1, 2016
Charged particle beam apparatus having needle probe that tracks target position changes
HITACHI HIGH TECH SCIENCE CORP7 citations84
US11073453B2Jul 27, 2021
Automatic sample preparation apparatus and automatic sample preparation method
HITACHI HIGH TECH SCIENCE CORP2 citations73
US10236159B2Mar 19, 2019
Charged particle beam apparatus
HITACHI HIGH TECH SCIENCE CORP3 citations73
US9966226B2May 8, 2018
Cross-section processing and observation method and cross-section processing and observation apparatus
HITACHI HIGH TECH SCIENCE CORP2 citations73
US9934938B2Apr 3, 2018
Focused ion beam apparatus, method for observing cross-section of sample by using the same, and storage medium
HITACHI HIGH TECH SCIENCE CORP3 citations73
US11835438B2Dec 5, 2023
Automatic sample preparation apparatus
HITACHI HIGH TECH SCIENCE CORP0 citations62
US9202671B2Dec 1, 2015
Charged particle beam apparatus and sample processing method using charged particle beam apparatus
HITACHI HIGH TECH SCIENCE CORP2 citations62
US9080945B2Jul 14, 2015
Cross-section processing and observation method and cross-section processing and observation apparatus
HITACHI HIGH TECH SCIENCE CORP2 citations62
US8642980B2Feb 4, 2014
Composite charged particle beam apparatus
HITACHI HIGH TECH SCIENCE CORP2 citations62
US9336987B2May 10, 2016
Charged particle beam apparatus
HITACHI HIGH TECH SCIENCE CORP2 citations61
US11133149B2Sep 28, 2021
Focused ion beam apparatus
HITACHI HIGH TECH SCIENCE CORP1 citations60
US11742177B2Aug 29, 2023
Charged particle beam apparatus and control method thereof
HITACHI HIGH TECH SCIENCE CORP0 citations59
US11361936B2Jun 14, 2022
Charged particle beam apparatus
HITACHI HIGH TECH SCIENCE CORP0 citations59
US11177113B2Nov 16, 2021
Charged particle beam apparatus and control method thereof
HITACHI HIGH TECH SCIENCE CORP0 citations59
US11476078B2Oct 18, 2022
Charged particle beam apparatus
HITACHI HIGH TECH SCIENCE CORP0 citations52
US10658147B2May 19, 2020
Charged particle beam apparatus
HITACHI HIGH TECH SCIENCE CORP0 citations52
US10096449B2Oct 9, 2018
Cross-section processing-and-observation method and cross-section processing-and-observation apparatus
HITACHI HIGH TECH SCIENCE CORP0 citations52
US9368323B2Jun 14, 2016
Charged particle beam device, control method for charged particle beam device, and cross-section processing observation apparatus
HITACHI HIGH TECH SCIENCE CORP1 citations52
US9245713B2Jan 26, 2016
Charged particle beam apparatus
HITACHI HIGH TECH SCIENCE CORP0 citations52
US9218937B2Dec 22, 2015
Charged particle beam apparatus having improved needle movement control
HITACHI HIGH TECH SCIENCE CORP0 citations52
US11482398B2Oct 25, 2022
Focused ion beam apparatus
HITACHI HIGH TECH SCIENCE CORP0 citations49
US11239046B2Feb 1, 2022
Charged particle beam apparatus
HITACHI HIGH TECH SCIENCE CORP0 citations49
US10485087B2Nov 19, 2019
Portable information terminal, beam irradiation system, and program
HITACHI HIGH TECH SCIENCE CORP0 citations49
US10242842B2Mar 26, 2019
Method for cross-section processing and observation and apparatus therefor
HITACHI HIGH TECH SCIENCE CORP0 citations41
US9318303B2Apr 19, 2016
Charged particle beam apparatus
HITACHI HIGH TECH SCIENCE CORP0 citations41
US9287087B2Mar 15, 2016
Sample observation method, sample preparation method, and charged particle beam apparatus
HITACHI HIGH TECH SCIENCE CORP0 citations41
US10186398B2Jan 22, 2019
Sample positioning method and charged particle beam apparatus
HITACHI HIGH TECH SCIENCE CORP0 citations36
SII NANOTECHNOLOGY INC
3 patentsUS6852973B2Feb 8, 2005
Scanning charged particle microscope
SII NANOTECHNOLOGY INC54 citations96
US7571639B2Aug 11, 2009
Method of correcting opaque defect of photomask using atomic force microscope fine processing device
SII NANOTECHNOLOGY INC4 citations63
US7442925B2Oct 28, 2008
Working method using scanning probe
SII NANOTECHNOLOGY INC0 citations49
HITACHI HIGH-TECH SCIENCE CORP
3 patentsUS9620333B2Apr 11, 2017
Charged particle beam apparatus
HITACHI HIGH-TECH SCIENCE CORP9 citations84
US9548185B2Jan 17, 2017
Cross section processing method and cross section processing apparatus
HITACHI HIGH-TECH SCIENCE CORP4 citations73
US9741535B2Aug 22, 2017
Charged particle beam apparatus
HITACHI HIGH-TECH SCIENCE CORP0 citations40