Inventor

SHARONI OFIR

IL6 patents

⚠️ This page may combine multiple inventors who share the name “SHARONI OFIR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DMITRIEV VLADIMIR

2 patents

US9207530B2Dec 8, 2015

Analyses of measurement data

DMITRIEV VLADIMIR2 citations57

US8869076B2Oct 21, 2014

Global landmark method for critical dimension uniformity reconstruction

DMITRIEV VLADIMIR0 citations38

ZEISS CARL SMT GMBH

1 patent

US10061192B2Aug 28, 2018

Method and apparatus for correcting errors on a wafer processed by a photolithographic mask

ZEISS CARL SMT GMBH6 citations82

BEYER DIRK

1 patent

US9436080B2Sep 6, 2016

Method and apparatus for correcting errors on a wafer processed by a photolithographic mask

BEYER DIRK9 citations77

SHARONI OFIR

1 patent

US9134112B2Sep 15, 2015

Critical dimension uniformity correction by scanner signature control

SHARONI OFIR2 citations49

BEN-ZVI GUY

1 patent

US8592770B2Nov 26, 2013

Method and apparatus for DUV transmission mapping

BEN-ZVI GUY0 citations43