Inventor
VON KLUGE JOHANNES
DE7 patents
⚠️ This page may combine multiple inventors who share the name “VON KLUGE JOHANNES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GLOBALFOUNDRIES INC
4 patentsUS9054041B2Jun 9, 2015
Methods for etching dielectric materials in the fabrication of integrated circuits
GLOBALFOUNDRIES INC2 citations60
US8716136B1May 6, 2014
Method of forming a semiconductor structure including a wet etch process for removing silicon nitride
GLOBALFOUNDRIES INC0 citations50
US9537006B2Jan 3, 2017
Circuit element including a layer of a stress-creating material providing a variable stress
GLOBALFOUNDRIES INC0 citations48
US9209174B2Dec 8, 2015
Circuit element including a layer of a stress-creating material providing a variable stress and method for the formation thereof
GLOBALFOUNDRIES INC0 citations48