Inventor

HAN JE-WOO

KR22 patents

⚠️ This page may combine multiple inventors who share the name “HAN JE-WOO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HAN JE-WOO

SAMSUNG ELECTRONICS CO LTD

Method for forming fine patterns of a semiconductor device using double patterning

Semiconductor devices including a support for an electrode and methods of forming semiconductor devices including a support for an electrode

Methods of fabricating a semiconductor device with capacitors using mold structure and protection layer

Patterning method using metal mask and method of fabricating semiconductor device including the same patterning method

Method of fabricating semiconductor devices

Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor device

Substrate processing apparatus and method of processing a substrate

Plasma processing method, plasma processing apparatus and method of manufacturing semiconductor device using the apparatus

Plasma processing method, plasma processing apparatus and method of manufacturing semiconductor device using the apparatus

Substrate processing apparatus including edge ring

Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor device

Method of fabricating semiconductor devices

Method of fabricating semiconductor devices

System for fabricating a semiconductor device

Method for fabricating a semiconductor device

Method of fabricating semiconductor device using photo key

Method of forming fine pattern of semiconductor device

YOON JUNHO

Semiconductor devices including a support for an electrode and methods of forming semiconductor devices including a support for an electrode

PARK JAE-HONG

Methods of forming semiconductor device using bowing control layer

YOON JUN-HO

Method of fabricating semiconductor device

JEON YONG-HO

Methods of manufacturing semiconductor devices

JEON KYUNG-YUB

Method of forming semiconductor device