Inventor
CHANG HUNG-PIN
TW41 patents
⚠️ This page may combine multiple inventors who share the name “CHANG HUNG-PIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
18 patentsUS10163756B2Dec 25, 2018
Isolation structure for stacked dies
TAIWAN SEMICONDUCTOR MFG CO LTD11 citations84
US11594420B1Feb 28, 2023
Semiconductor structure and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US10978346B2Apr 13, 2021
Conductive vias in semiconductor packages and methods of forming same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10515933B2Dec 24, 2019
System, structure, and method of manufacturing a semiconductor substrate stack
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10510604B2Dec 17, 2019
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10269761B2Apr 23, 2019
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10163709B2Dec 25, 2018
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US9601410B2Mar 21, 2017
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US12142485B2Nov 12, 2024
Semiconductor structure and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11688639B2Jun 27, 2023
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11004832B2May 11, 2021
System, structure, and method of manufacturing a semiconductor substrate stack
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US10049931B2Aug 14, 2018
Method of manufacturing a semiconductor device including through silicon plugs
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations63
US9728457B2Aug 8, 2017
System, structure, and method of manufacturing a semiconductor substrate stack
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations63
US12550737B2Feb 10, 2026
Semiconductor package and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10510603B2Dec 17, 2019
Conductive vias in semiconductor packages and methods of forming same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US10497619B2Dec 3, 2019
Method of manufacturing a semiconductor device including through silicon plugs
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US9978607B2May 22, 2018
Through via structure and method
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations52
US9799694B2Oct 24, 2017
Backside through vias in a bonded structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
CHANG HUNG-PIN
6 patentsUS8513119B2Aug 20, 2013
Method of forming bump structure having tapered sidewalls for stacked dies
CHANG HUNG-PIN35 citations94
US8853830B2Oct 7, 2014
System, structure, and method of manufacturing a semiconductor substrate stack
CHANG HUNG-PIN12 citations92
US8466059B2Jun 18, 2013
Multi-layer interconnect structure for stacked dies
CHANG HUNG-PIN32 citations92
US8319336B2Nov 27, 2012
Reduction of etch microloading for through silicon vias
CHANG HUNG-PIN8 citations84
US8841773B2Sep 23, 2014
Multi-layer interconnect structure for stacked dies
CHANG HUNG-PIN6 citations83
US8329578B2Dec 11, 2012
Via structure and via etching process of forming the same
CHANG HUNG-PIN3 citations62
TAIWAN SEMICONDUCTOR MFG
6 patentsUS9312225B2Apr 12, 2016
Bump structure for stacked dies
TAIWAN SEMICONDUCTOR MFG7 citations84
US9293418B2Mar 22, 2016
Backside through vias in a bonded structure
TAIWAN SEMICONDUCTOR MFG7 citations84
US8896127B2Nov 25, 2014
Via structure and via etching process of forming the same
TAIWAN SEMICONDUCTOR MFG3 citations63
US8476116B2Jul 2, 2013
Reduction of etch microloading for through silicon vias
TAIWAN SEMICONDUCTOR MFG4 citations63
US9287440B2Mar 15, 2016
Method of manufacturing a semiconductor device including through silicon plugs
TAIWAN SEMICONDUCTOR MFG0 citations52
US8836085B2Sep 16, 2014
Cost-effective TSV formation
TAIWAN SEMICONDUCTOR MFG1 citations52
UNIV CALIFORNIA
4 patentsUS7084724B2Aug 1, 2006
MEMS fabrication on a laminated substrate
UNIV CALIFORNIA16 citations92
US7265647B2Sep 4, 2007
High isolation tunable MEMS capacitive switch
UNIV CALIFORNIA12 citations82
US7541898B2Jun 2, 2009
High isolation tunable MEMS capacitive switch
UNIV CALIFORNIA7 citations72
US7884689B2Feb 8, 2011
MEMS fabrication on a laminated substrate
UNIV CALIFORNIA3 citations62