Inventor
HANAWA YOSUKE
JP14 patents
Patents
14 patentsUS10286425B2May 14, 2019
Substrate cleaning method and substrate cleaning apparatus
SCREEN HOLDINGS CO LTD7 citations83
US10153181B2Dec 11, 2018
Substrate treating apparatus and substrate treating method
SCREEN HOLDINGS CO LTD10 citations83
US9976804B2May 22, 2018
Vapor supplying apparatus, vapor drying apparatus, vapor supplying method, and vapor drying method
SCREEN HOLDINGS CO LTD7 citations83
US10699920B2Jun 30, 2020
Substrate treating method and substrate treating apparatus
SCREEN HOLDINGS CO LTD2 citations72
US11133175B2Sep 28, 2021
Substrate treating method and substrate treating apparatus
SCREEN HOLDINGS CO LTD2 citations71
US11897009B2Feb 13, 2024
Substrate processing method and substrate processing device
SCREEN HOLDINGS CO LTD0 citations61
US11158523B2Oct 26, 2021
Substrate drying method and substrate drying apparatus
SCREEN HOLDINGS CO LTD0 citations61
US11908938B2Feb 20, 2024
Substrate processing liquid for etching a metal layer, substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations60
US12475386B2Nov 18, 2025
Learning device, information processing apparatus, substrate processing device, substrate processing system, learning method, recipe determination method and non-transitory computer-readable medium storing learning program
SCREEN HOLDINGS CO LTD0 citations55
US11094565B2Aug 17, 2021
Substrate treating method, substrate treating liquid and substrate treating apparatus
SCREEN HOLDINGS CO LTD0 citations51
US10612844B2Apr 7, 2020
Vapor supplying apparatus, vapor drying apparatus, vapor supplying method, and vapor drying method
SCREEN HOLDINGS CO LTD0 citations51
US9859110B2Jan 2, 2018
Substrate cleaning method and substrate cleaning apparatus
SCREEN HOLDINGS CO LTD0 citations51
US9728396B2Aug 8, 2017
Substrate cleaning method and substrate cleaning apparatus
SCREEN HOLDINGS CO LTD0 citations51
US10720342B2Jul 21, 2020
Substrate treating apparatus and substrate treating method
SCREEN HOLDINGS CO LTD0 citations40