Inventor
UEDA DAI
JP11 patents
⚠️ This page may combine multiple inventors who share the name “UEDA DAI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCREEN HOLDINGS CO LTD
9 patentsUS10153181B2Dec 11, 2018
Substrate treating apparatus and substrate treating method
SCREEN HOLDINGS CO LTD10 citations83
US11211241B2Dec 28, 2021
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD4 citations71
US11133175B2Sep 28, 2021
Substrate treating method and substrate treating apparatus
SCREEN HOLDINGS CO LTD2 citations71
US10792712B2Oct 6, 2020
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD6 citations71
US10619894B2Apr 14, 2020
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD1 citations62
US11901173B2Feb 13, 2024
Substrate processing method
SCREEN HOLDINGS CO LTD0 citations61
US11897009B2Feb 13, 2024
Substrate processing method and substrate processing device
SCREEN HOLDINGS CO LTD0 citations61
US11260431B2Mar 1, 2022
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD1 citations61
US11908938B2Feb 20, 2024
Substrate processing liquid for etching a metal layer, substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations60