Inventor
VAJARIA HIMANSHU
US8 patents
⚠️ This page may combine multiple inventors who share the name “VAJARIA HIMANSHU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
7 patentsUS9734568B2Aug 15, 2017
Automated inline inspection and metrology using shadow-gram images
KLA TENCOR CORP15 citations80
US10997710B2May 4, 2021
Adaptive care areas for die-die inspection
KLA TENCOR CORP1 citations61
US10522376B2Dec 31, 2019
Multi-step image alignment method for large offset die-die inspection
KLA TENCOR CORP1 citations61
US10365639B2Jul 30, 2019
Feature selection and automated process window monitoring through outlier detection
KLA TENCOR CORP1 citations59
US10290088B2May 14, 2019
Wafer and lot based hierarchical method combining customized metrics with a global classification methodology to monitor process tool condition at extremely high throughput
KLA TENCOR CORP1 citations59
US10949964B2Mar 16, 2021
Super-resolution defect review image generation through generative adversarial networks
KLA TENCOR CORP1 citations58
US9569834B2Feb 14, 2017
Automated image-based process monitoring and control
KLA TENCOR CORP0 citations50