Inventor

CHENG SHYH-WEI

TW22 patents

⚠️ This page may combine multiple inventors who share the name “CHENG SHYH-WEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHENG SHYH-WEI

TAIWAN SEMICONDUCTOR MFG CO LTD

Movement microelectromechanical systems (MEMS) package

Inter-poly connection for parasitic capacitor and die size improvement

Anti-stiction process for MEMS device

Anti-stiction process for MEMS device

Method for forming semiconductor device structure with conductive line

Inter-poly connection for parasitic capacitor and die size improvement

Heater design for MEMS chamber pressure control

Selective nitride outgassing process for MEMS cavity pressure control

Method of manufacturing a motion sensor device

One-time-programming (OTP) memory cell with floating gate shielding

Metal-insulator-metal (MIM) capacitor with an electrode scheme for improved manufacturability and reliability

Inter-poly connection for parasitic capacitor and die size improvement

Anti-stiction process for MEMS device

Mechanism for forming MEMS device

Method for forming semiconductor device structure with conductive line

Method for forming semiconductor device structure with conductive line

Heater design for MEMS chamber pressure control

Metal-oxide-semiconductor field-effect transistor with extended gate dielectric layer

Method of fabricating MEMS devices having a plurality of cavities

TAIWAN SEMICONDUCTOR MFG

Metal-oxide-semiconductor field-effect transistor with extended gate dielectric layer

MEMS devices having a plurality of cavities

CHENG SHYH-WEI

Motion sensor device and methods for forming the same