Inventor
WANG CHIH-YU
TW29 patents
⚠️ This page may combine multiple inventors who share the name “WANG CHIH-YU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
22 patentsUS11543363B2Jan 3, 2023
Systems and methods for wafer bond monitoring
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations85
US9527721B2Dec 27, 2016
Movement microelectromechanical systems (MEMS) package
TAIWAN SEMICONDUCTOR MFG CO LTD14 citations81
US11407636B2Aug 9, 2022
Inter-poly connection for parasitic capacitor and die size improvement
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations72
US11145526B2Oct 12, 2021
Method of analyzing a manufacturing of a semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations72
US10155656B2Dec 18, 2018
Inter-poly connection for parasitic capacitor and die size improvement
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations72
US10131536B2Nov 20, 2018
Heater design for MEMS chamber pressure control
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US9880192B2Jan 30, 2018
Method of manufacturing a motion sensor device
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations72
US11565365B2Jan 31, 2023
System and method for monitoring chemical mechanical polishing
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations70
US10872793B2Dec 22, 2020
System and method for monitoring operation conditions of semiconductor manufacturing apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations70
US12583740B2Mar 24, 2026
Inter-poly connection for parasitic capacitor and die size improvement
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12327729B2Jun 10, 2025
Semiconductor FinFET device and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12100604B2Sep 24, 2024
Method and system for recognizing and addressing plasma discharge during semiconductor processes
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12085518B2Sep 10, 2024
Systems and methods for wafer bond monitoring
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11894250B2Feb 6, 2024
Method and system for recognizing and addressing plasma discharge during semiconductor processes
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11815471B2Nov 14, 2023
Systems and methods for wafer bond monitoring
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11615965B2Mar 28, 2023
Semiconductor FinFET device and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10770302B2Sep 8, 2020
Semiconductor FinFET device and method
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US12521836B2Jan 13, 2026
System and method for monitoring chemical mechanical polishing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US9090452B2Jul 28, 2015
Mechanism for forming MEMS device
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations58
US11688413B2Jun 27, 2023
Method and system for audio recognition of arcing during semiconductor process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10532925B2Jan 14, 2020
Heater design for MEMS chamber pressure control
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9561954B2Feb 7, 2017
Method of fabricating MEMS devices having a plurality of cavities
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51