Inventor
LUU KY
US8 patents
⚠️ This page may combine multiple inventors who share the name “LUU KY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MKS INSTR INC
7 patentsUS10546724B2Jan 28, 2020
Pulsed, bidirectional radio frequency source/load
MKS INSTR INC40 citations92
US10396601B2Aug 27, 2019
Piecewise RF power systems and methods for supplying pre-distorted RF bias voltage signals to an electrode in a processing chamber
MKS INSTR INC7 citations83
US9748864B2Aug 29, 2017
Power supply circuits incorporating transformers for combining of power amplifier outputs and isolation of load voltage clamping circuits
MKS INSTR INC14 citations81
US10930470B2Feb 23, 2021
Pulsed, bidirectional radio frequency source/load
MKS INSTR INC3 citations71
US11533805B2Dec 20, 2022
Cooling and compression clamp for short lead power devices
MKS INSTR INC5 citations68
US11011940B2May 18, 2021
Piecewise RF power systems and methods for supplying pre-distorted RF bias voltage signals to an electrode in a processing chamber
MKS INSTR INC1 citations61
US11076477B2Jul 27, 2021
Cooling and compression clamp for short lead power devices
MKS INSTR INC0 citations58