Inventor
HARRINGTON MATTHEW G
US3 patents
Patents
3 patentsUS10546724B2Jan 28, 2020
Pulsed, bidirectional radio frequency source/load
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US11536755B2Dec 27, 2022
System and method for arc detection using a bias RF generator signal
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US10930470B2Feb 23, 2021
Pulsed, bidirectional radio frequency source/load
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