Inventor
KLEIN JESSE N
US9 patents
⚠️ This page may combine multiple inventors who share the name “KLEIN JESSE N”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MKS INSTR INC
8 patentsUS10741363B1Aug 11, 2020
Extremum seeking control apparatus and method for automatic frequency tuning for RF impedance matching
MKS INSTR INC38 citations92
US10546724B2Jan 28, 2020
Pulsed, bidirectional radio frequency source/load
MKS INSTR INC40 citations92
US7206210B2Apr 17, 2007
Power supply control loop with multiple leveling modes
MKS INSTR INC29 citations91
US6995545B2Feb 7, 2006
Control system for a sputtering system
MKS INSTR INC32 citations91
US9316675B2Apr 19, 2016
Secondary plasma detection systems and methods
MKS INSTR INC7 citations82
US10930470B2Feb 23, 2021
Pulsed, bidirectional radio frequency source/load
MKS INSTR INC3 citations71
US7336511B2Feb 26, 2008
Power supply control loop with multiple leveling modes
MKS INSTR INC1 citations50
US10607821B2Mar 31, 2020
Sputtering system and method including an arc detection
MKS INSTR INC0 citations45