Inventor
KITADA TORU
US10 patents
⚠️ This page may combine multiple inventors who share the name “KITADA TORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
7 patentsUS10309005B2Jun 4, 2019
Deposition device and deposition method
TOKYO ELECTRON LTD3 citations72
US9790590B2Oct 17, 2017
Vacuum-processing apparatus, vacuum-processing method, and storage medium
TOKYO ELECTRON LTD6 citations71
US12018928B2Jun 25, 2024
Film thickness measurement method, film thickness measurement device, and film formation system
TOKYO ELECTRON LTD0 citations59
US12488970B2Dec 2, 2025
Film forming apparatus and method of controlling film forming apparatus
TOKYO ELECTRON LTD0 citations50
US11894222B2Feb 6, 2024
Film forming apparatus and film forming method
TOKYO ELECTRON LTD0 citations50
US12486565B2Dec 2, 2025
Sputtering apparatus and control method
TOKYO ELECTRON LTD0 citations48
US12387922B2Aug 12, 2025
Film forming apparatus, processing condition determination method, and film forming method
TOKYO ELECTRON LTD0 citations47