Inventor
HUSEMANN CHRISTOPH
DE24 patents
⚠️ This page may combine multiple inventors who share the name “HUSEMANN CHRISTOPH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
13 patentsUS10068325B2Sep 4, 2018
Method for three-dimensionally measuring a 3D aerial image of a lithography mask
ZEISS CARL SMT GMBH10 citations82
US10108085B2Oct 23, 2018
Method for localizing defects on substrates
ZEISS CARL SMT GMBH13 citations79
US11774859B2Oct 3, 2023
Method and apparatus for evaluating an unknown effect of defects of an element of a photolithography process
ZEISS CARL SMT GMBH2 citations71
US11079338B2Aug 3, 2021
Method for detecting a structure of a lithography mask and device for carrying out the method
ZEISS CARL SMT GMBH2 citations71
US10634886B2Apr 28, 2020
Method for three-dimensionally measuring a 3D aerial image of a lithography mask
ZEISS CARL SMT GMBH1 citations71
US11892769B2Feb 6, 2024
Method for detecting an object structure and apparatus for carrying out the method
ZEISS CARL SMT GMBH2 citations70
US12111579B2Oct 8, 2024
Method and apparatus for evaluating an unknown effect of defects of an element of a photolithography process
ZEISS CARL SMT GMBH0 citations61
US12001145B2Jun 4, 2024
Apparatus and method for analyzing an element of a photolithography process with the aid of a transformation model
ZEISS CARL SMT GMBH1 citations61
US11054305B2Jul 6, 2021
Method and device for beam analysis
ZEISS CARL SMT GMBH1 citations60
US10605654B2Mar 31, 2020
Method and device for beam analysis
ZEISS CARL SMT GMBH1 citations60
US10788748B2Sep 29, 2020
Method and appliance for predicting the imaging result obtained with a mask when a lithography process is carried out
ZEISS CARL SMT GMBH1 citations58
US12307334B2May 20, 2025
Method and device for evaluating a statistically distributed measured value in the examination of an element of a photolithography process
ZEISS CARL SMT GMBH0 citations47
US12560864B2Feb 24, 2026
Method for ascertaining an image of an object
ZEISS CARL SMT GMBH0 citations44
ZEISS CARL MICROSCOPY GMBH
10 patentsUS10670387B2Jun 2, 2020
Determining the position of an object in the beam path of an optical device
ZEISS CARL MICROSCOPY GMBH3 citations72
US10620417B2Apr 14, 2020
Method for generating a reflection-reduced contrast image and corresponding device
ZEISS CARL MICROSCOPY GMBH2 citations72
US10330913B2Jun 25, 2019
Method and device for imaging an object
ZEISS CARL MICROSCOPY GMBH2 citations72
US10191292B2Jan 29, 2019
Apparatus and method for light modulation
ZEISS CARL MICROSCOPY GMBH1 citations62
US10475168B2Nov 12, 2019
Method for generating a result image and optical device
ZEISS CARL MICROSCOPY GMBH0 citations52
US12335614B2Jun 17, 2025
Method and device for determining the optimal position of the focal plane for examining a specimen by microscopy
ZEISS CARL MICROSCOPY GMBH0 citations50
US11442263B2Sep 13, 2022
Method and devices for displaying stereoscopic images
ZEISS CARL MICROSCOPY GMBH0 citations47
US12345864B2Jul 1, 2025
Apparatus and method for manipulating a focus of excitation light on or in a sample and microscope
ZEISS CARL MICROSCOPY GMBH0 citations42
US10338368B2Jul 2, 2019
Phase contrast imaging
ZEISS CARL MICROSCOPY GMBH0 citations41
US10175468B2Jan 8, 2019
Method for generating a contrast image of an object structure and apparatuses relating thereto
ZEISS CARL MICROSCOPY GMBH0 citations41