P

Inventor

HUSEMANN CHRISTOPH

DE24 patents
⚠️ This page may combine multiple inventors who share the name “HUSEMANN CHRISTOPH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT GMBH

13 patents
US10068325B2Sep 4, 2018

Method for three-dimensionally measuring a 3D aerial image of a lithography mask

ZEISS CARL SMT GMBH10 citations82
US10108085B2Oct 23, 2018

Method for localizing defects on substrates

ZEISS CARL SMT GMBH13 citations79
US11774859B2Oct 3, 2023

Method and apparatus for evaluating an unknown effect of defects of an element of a photolithography process

ZEISS CARL SMT GMBH2 citations71
US11079338B2Aug 3, 2021

Method for detecting a structure of a lithography mask and device for carrying out the method

ZEISS CARL SMT GMBH2 citations71
US10634886B2Apr 28, 2020

Method for three-dimensionally measuring a 3D aerial image of a lithography mask

ZEISS CARL SMT GMBH1 citations71
US11892769B2Feb 6, 2024

Method for detecting an object structure and apparatus for carrying out the method

ZEISS CARL SMT GMBH2 citations70
US12111579B2Oct 8, 2024

Method and apparatus for evaluating an unknown effect of defects of an element of a photolithography process

ZEISS CARL SMT GMBH0 citations61
US12001145B2Jun 4, 2024

Apparatus and method for analyzing an element of a photolithography process with the aid of a transformation model

ZEISS CARL SMT GMBH1 citations61
US11054305B2Jul 6, 2021

Method and device for beam analysis

ZEISS CARL SMT GMBH1 citations60
US10605654B2Mar 31, 2020

Method and device for beam analysis

ZEISS CARL SMT GMBH1 citations60
US10788748B2Sep 29, 2020

Method and appliance for predicting the imaging result obtained with a mask when a lithography process is carried out

ZEISS CARL SMT GMBH1 citations58
US12307334B2May 20, 2025

Method and device for evaluating a statistically distributed measured value in the examination of an element of a photolithography process

ZEISS CARL SMT GMBH0 citations47
US12560864B2Feb 24, 2026

Method for ascertaining an image of an object

ZEISS CARL SMT GMBH0 citations44

ZEISS CARL MICROSCOPY GMBH

10 patents

ZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH

1 patent