Inventor
FUSE TAKASHI
JP23 patents
⚠️ This page may combine multiple inventors who share the name “FUSE TAKASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
12 patentsUS7473377B2Jan 6, 2009
Plasma processing method
TOKYO ELECTRON LTD14 citations80
US7554095B2Jun 30, 2009
Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method, and method of manufacturing substrate
TOKYO ELECTRON LTD7 citations71
US7521687B2Apr 21, 2009
Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method and method of manufacturing substrate
TOKYO ELECTRON LTD5 citations71
US7141510B2Nov 28, 2006
Plasma processing method
TOKYO ELECTRON LTD3 citations62
US7432207B2Oct 7, 2008
Method for etching object to be processed
TOKYO ELECTRON LTD4 citations59
US10600621B2Mar 24, 2020
Plasma electrode and plasma processing device
TOKYO ELECTRON LTD1 citations58
US6914010B2Jul 5, 2005
Plasma etching method
TOKYO ELECTRON LTD3 citations55
US12482650B2Nov 25, 2025
Film formation method
TOKYO ELECTRON LTD0 citations51
US7381653B2Jun 3, 2008
Plasma processing method
TOKYO ELECTRON LTD0 citations51
US11879067B2Jan 23, 2024
Film forming method and film forming apparatus
TOKYO ELECTRON LTD0 citations50
US7550739B2Jun 23, 2009
Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method and method of manufacturing substrate
TOKYO ELECTRON LTD0 citations50
US7507673B2Mar 24, 2009
Method for etching an object to be processed
TOKYO ELECTRON LTD0 citations48
FUJITSU LTD
7 patentsUS6555836B1Apr 29, 2003
Method and apparatus for inspecting bumps and determining height from a regular reflection region
FUJITSU LTD22 citations91
US6052189AApr 18, 2000
Height measurement device and height measurement method
FUJITSU LTD32 citations91
US5999266ADec 7, 1999
Method for inspecting height, and a height inspection apparatus to carry out the method
FUJITSU LTD48 citations91
US7443516B2Oct 28, 2008
Optical-distortion correcting apparatus and optical-distortion correcting method
FUJITSU LTD7 citations72
US6104493AAug 15, 2000
Method and apparatus for visual inspection of bump array
FUJITSU LTD9 citations72
US10664964B2May 26, 2020
Abnormal detection apparatus and method
FUJITSU LTD0 citations41
US10467745B2Nov 5, 2019
Abnormality detection device, abnormality detection method and non-transitory computer-readable recording medium
FUJITSU LTD0 citations41