Inventor
KAO CHIA-LING
US11 patents
⚠️ This page may combine multiple inventors who share the name “KAO CHIA-LING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
9 patentsUS8895449B1Nov 25, 2014
Delicate dry clean
APPLIED MATERIALS INC182 citations98
US8992792B2Mar 31, 2015
Method of fabricating an ultra low-k dielectric self-aligned via
APPLIED MATERIALS INC20 citations92
US10170336B1Jan 1, 2019
Methods for anisotropic control of selective silicon removal
APPLIED MATERIALS INC4 citations73
US10872778B2Dec 22, 2020
Systems and methods utilizing solid-phase etchants
APPLIED MATERIALS INC1 citations62
US9299577B2Mar 29, 2016
Methods for etching a dielectric barrier layer in a dual damascene structure
APPLIED MATERIALS INC2 citations62
US7981812B2Jul 19, 2011
Methods for forming ultra thin structures on a substrate
APPLIED MATERIALS INC4 citations61
US12334358B2Jun 17, 2025
Integration processes utilizing boron-doped silicon materials
APPLIED MATERIALS INC0 citations58
US10755941B2Aug 25, 2020
Self-limiting selective etching systems and methods
APPLIED MATERIALS INC0 citations52
US9514953B2Dec 6, 2016
Methods for barrier layer removal
APPLIED MATERIALS INC1 citations52