Inventor
LEONG JENN-KUEN
US9 patents
⚠️ This page may combine multiple inventors who share the name “LEONG JENN-KUEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA CORP
5 patentsUS10942135B2Mar 9, 2021
Radial polarizer for particle detection
KLA CORP9 citations85
US10948423B2Mar 16, 2021
Sensitive particle detection with spatially-varying polarization rotator and polarizer
KLA CORP7 citations84
US11243175B2Feb 8, 2022
Sensitive particle detection with spatially-varying polarization rotator and polarizer
KLA CORP0 citations62
US11879853B2Jan 23, 2024
Continuous degenerate elliptical retarder for sensitive particle detection
KLA CORP0 citations52
US11733172B2Aug 22, 2023
Apparatus and method for rotating an optical objective
KLA CORP0 citations51