Inventor
KAVALDJIEV DANIEL
US24 patents
⚠️ This page may combine multiple inventors who share the name “KAVALDJIEV DANIEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
7 patentsUS9891177B2Feb 13, 2018
TDI sensor in a darkfield system
KLA TENCOR CORP56 citations96
US7912658B2Mar 22, 2011
Systems and methods for determining two or more characteristics of a wafer
KLA TENCOR CORP19 citations84
US7173715B2Feb 6, 2007
Reduced coherence symmetric grazing incidence differential interferometer
KLA TENCOR CORP11 citations83
US10488348B2Nov 26, 2019
Wafer inspection
KLA TENCOR CORP3 citations72
US9915622B2Mar 13, 2018
Wafer inspection
KLA TENCOR CORP0 citations51
US11441893B2Sep 13, 2022
Multi-spot analysis system with multiple optical probes
KLA TENCOR CORP0 citations48
US8934091B2Jan 13, 2015
Monitoring incident beam position in a wafer inspection system
KLA TENCOR CORP0 citations48
KLA CORP
5 patentsUS10942135B2Mar 9, 2021
Radial polarizer for particle detection
KLA CORP9 citations85
US10948423B2Mar 16, 2021
Sensitive particle detection with spatially-varying polarization rotator and polarizer
KLA CORP7 citations84
US11243175B2Feb 8, 2022
Sensitive particle detection with spatially-varying polarization rotator and polarizer
KLA CORP0 citations62
US12535431B2Jan 27, 2026
Sample inspection with multiple measurement modes
KLA CORP0 citations52
US11733172B2Aug 22, 2023
Apparatus and method for rotating an optical objective
KLA CORP0 citations51
BIELLAK STEPHEN
4 patentsUS8629384B1Jan 14, 2014
Photomultiplier tube optimized for surface inspection in the ultraviolet
BIELLAK STEPHEN42 citations92
US8169613B1May 1, 2012
Segmented polarizer for optimizing performance of a surface inspection system
BIELLAK STEPHEN23 citations92
US8520208B1Aug 27, 2013
Segmented polarizer for optimizing performance of a surface inspection system
BIELLAK STEPHEN9 citations83
US8294887B1Oct 23, 2012
Fast laser power control with improved reliability for surface inspection
BIELLAK STEPHEN11 citations83
KLA TENCOR TECH CORP
2 patentsUS7528944B2May 5, 2009
Methods and systems for detecting pinholes in a film formed on a wafer or for monitoring a thermal process tool
KLA TENCOR TECH CORP28 citations91
US7436505B2Oct 14, 2008
Computer-implemented methods and systems for determining a configuration for a light scattering inspection system
KLA TENCOR TECH CORP12 citations80