Inventor
YANG ZUSING
TW6 patents
Patents
6 patentsUS9449821B2Sep 20, 2016
Composite hard mask etching profile for preventing pattern collapse in high-aspect-ratio trenches
MACRONIX INT CO LTD8 citations82
US9012282B2Apr 21, 2015
Self-aligned liner method of avoiding PL gate damage
MACRONIX INT CO LTD5 citations81
US9337036B2May 10, 2016
Method of forming copper sulfide film for reducing copper oxidization and loss
MACRONIX INT CO LTD0 citations50
US9287285B2Mar 15, 2016
Self-aligned liner method of avoiding PL gate damage
MACRONIX INT CO LTD0 citations49
US9224803B2Dec 29, 2015
Formation of a high aspect ratio contact hole
MACRONIX INT CO LTD1 citations49
US11004863B2May 11, 2021
Non-volatile memory with gate all around thin film transistor and method of manufacturing the same
MACRONIX INT CO LTD0 citations47