Inventor
BABAYAN STEVEN E
US23 patents
⚠️ This page may combine multiple inventors who share the name “BABAYAN STEVEN E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
22 patentsUS11393710B2Jul 19, 2022
Wafer edge ring lifting solution
APPLIED MATERIALS INC9 citations85
US11114286B2Sep 7, 2021
In-situ optical chamber surface and process sensor
APPLIED MATERIALS INC14 citations85
US10607817B2Mar 31, 2020
Thermal repeatability and in-situ showerhead temperature monitoring
APPLIED MATERIALS INC7 citations84
US10440777B2Oct 8, 2019
Azimuthally tunable multi-zone electrostatic chuck
APPLIED MATERIALS INC6 citations81
US12334385B2Jun 17, 2025
Tunable temperature controlled substrate support assembly
APPLIED MATERIALS INC1 citations75
US11508558B2Nov 22, 2022
Thermal repeatability and in-situ showerhead temperature monitoring
APPLIED MATERIALS INC2 citations73
US11075105B2Jul 27, 2021
In-situ apparatus for semiconductor process module
APPLIED MATERIALS INC2 citations72
US11569114B2Jan 31, 2023
Semiconductor processing with cooled electrostatic chuck
APPLIED MATERIALS INC2 citations71
US11373893B2Jun 28, 2022
Cryogenic electrostatic chuck
APPLIED MATERIALS INC3 citations69
US9472435B2Oct 18, 2016
Tunable temperature controlled substrate support assembly
APPLIED MATERIALS INC2 citations63
US12094752B2Sep 17, 2024
Wafer edge ring lifting solution
APPLIED MATERIALS INC1 citations62
US12009244B2Jun 11, 2024
Tunable temperature controlled substrate support assembly
APPLIED MATERIALS INC0 citations62
US11887879B2Jan 30, 2024
In-situ apparatus for semiconductor process module
APPLIED MATERIALS INC0 citations62
US11735401B2Aug 22, 2023
In-situ optical chamber surface and process sensor
APPLIED MATERIALS INC0 citations62
US11721569B2Aug 8, 2023
Method and apparatus for determining a position of a ring within a process kit
APPLIED MATERIALS INC0 citations61
US12562353B2Feb 24, 2026
Replaceable electrostatic chuck outer ring for edge arcing mitigation
APPLIED MATERIALS INC0 citations60
US11622419B2Apr 4, 2023
Azimuthally tunable multi-zone electrostatic chuck
APPLIED MATERIALS INC0 citations59
US11437261B2Sep 6, 2022
Cryogenic electrostatic chuck
APPLIED MATERIALS INC0 citations59
US10410900B2Sep 10, 2019
Precision screen printing with sub-micron uniformity of metallization materials on green sheet ceramic
APPLIED MATERIALS INC1 citations58
US10535544B2Jan 14, 2020
Tunable temperature controlled substrate support assembly
APPLIED MATERIALS INC0 citations52
US12406865B2Sep 2, 2025
Substrate carrier with array of independently controllable heater elements
APPLIED MATERIALS INC0 citations51
US10409295B2Sep 10, 2019
Methods and apparatus for enhanced flow detection repeatability of thermal-based mass flow controllers (MFCS)
APPLIED MATERIALS INC0 citations41