Inventor
HERBOTS NICOLE
US6 patents
⚠️ This page may combine multiple inventors who share the name “HERBOTS NICOLE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MASSACHUSETTS INST TECHNOLOGY
2 patentsUS4800100AJan 24, 1989
Combined ion and molecular beam apparatus and method for depositing materials
MASSACHUSETTS INST TECHNOLOGY145 citations94
US5241214AAug 31, 1993
Oxides and nitrides of metastabale group iv alloys and nitrides of group iv elements and semiconductor devices formed thereof
MASSACHUSETTS INST TECHNOLOGY65 citations90