Inventor
CHANG CHIAO-KAI
TW6 patents
Patents
6 patentsUS10840066B2Nov 17, 2020
Adjustable fastening device for plasma gas injectors
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations81
US11043388B2Jun 22, 2021
Integrated circuit fabrication system with adjustable gas injector and method utilizing the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US11854769B2Dec 26, 2023
Adjustable fastening device for plasma gas injectors
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11670490B2Jun 6, 2023
Integrated circuit fabrication system with adjustable gas injector
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11361943B2Jun 14, 2022
Adjustable fastening device for plasma gas injectors
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11355318B2Jun 7, 2022
Adjustable fastening device for plasma gas injectors
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59