Inventor
BAGGEN MARCEL KOENRAAD MARIE
NL17 patents
⚠️ This page may combine multiple inventors who share the name “BAGGEN MARCEL KOENRAAD MARIE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
16 patentsUS7459701B2Dec 2, 2008
Stage apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV12 citations79
US10191393B2Jan 29, 2019
Lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV3 citations71
US7239370B2Jul 3, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations71
US6707530B2Mar 16, 2004
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV11 citations71
US11315752B2Apr 26, 2022
E-beam apparatus
ASML NETHERLANDS BV2 citations70
US10867770B2Dec 15, 2020
E-beam apparatus
ASML NETHERLANDS BV2 citations70
US8368868B2Feb 5, 2013
Lithographic apparatus with gas pressure means for controlling a planar position of a patterning device contactless
ASML NETHERLANDS BV2 citations62
US7675607B2Mar 9, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations61
US7667822B2Feb 23, 2010
Lithographic apparatus and stage apparatus
ASML NETHERLANDS BV6 citations60
US7884919B2Feb 8, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations59
US7830495B2Nov 9, 2010
Lithographic apparatus and position sensor
ASML NETHERLANDS BV4 citations58
US11476077B2Oct 18, 2022
Interferometric stage positioning apparatus
ASML NETHERLANDS BV0 citations51
US7733463B2Jun 8, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations49
US11621142B2Apr 4, 2023
Substrate positioning device and electron beam inspection tool
ASML NETHERLANDS BV0 citations48
US11302512B2Apr 12, 2022
Electron beam inspection apparatus stage positioning
ASML NETHERLANDS BV0 citations47
US10809634B2Oct 20, 2020
Stage system and metrology tool
ASML NETHERLANDS BV0 citations35