Inventor
BIJVOET DIRK-JAN
NL20 patents
⚠️ This page may combine multiple inventors who share the name “BIJVOET DIRK-JAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
16 patentsUS8345265B2Jan 1, 2013
Lithographic apparatus and methods for compensating substrate unflatness, determining the effect of patterning device unflatness, and determining the effect of thermal loads on a patterning device
ASML NETHERLANDS BV7 citations83
US7459701B2Dec 2, 2008
Stage apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV12 citations79
US7633600B2Dec 15, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations62
US7372549B2May 13, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations62
US7675607B2Mar 9, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations61
US7408615B2Aug 5, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations61
US7345736B2Mar 18, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations61
US7884919B2Feb 8, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations59
US7525636B2Apr 28, 2009
Lithographic apparatus and exposure method
ASML NETHERLANDS BV2 citations59
US7933000B2Apr 26, 2011
Device manufacturing method, method for holding a patterning device and lithographic apparatus including an applicator for applying molecules onto a clamp area of a patterning device
ASML NETHERLANDS BV1 citations51
US7355677B2Apr 8, 2008
System and method for an improved illumination system in a lithographic apparatus
ASML NETHERLANDS BV1 citations51
US7349067B2Mar 25, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations51
US7151591B2Dec 19, 2006
Alignment system, alignment method, and lithographic apparatus
ASML NETHERLANDS BV1 citations51
US7733463B2Jun 8, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations49
US7106420B2Sep 12, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations48
US8384881B2Feb 26, 2013
Lithographic apparatus, stage apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations41