Inventor
TARSHISH-SHAPIR INNA
IL6 patents
⚠️ This page may combine multiple inventors who share the name “TARSHISH-SHAPIR INNA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
3 patentsUS11137692B2Oct 5, 2021
Metrology targets and methods with oblique periodic structures
KLA TENCOR CORP3 citations72
US10242290B2Mar 26, 2019
Method, system, and user interface for metrology target characterization
KLA TENCOR CORP2 citations69
US10705434B2Jul 7, 2020
Verification metrology target and their design
KLA TENCOR CORP2 citations68