Inventor
SHAPHIROV DIANA
IL5 patents
Patents
5 patentsUS12105433B2Oct 1, 2024
Imaging overlay targets using moiré elements and rotational symmetry arrangements
KLA CORP2 citations71
US12111580B2Oct 8, 2024
Optical metrology utilizing short-wave infrared wavelengths
KLA CORP2 citations67
US11256177B2Feb 22, 2022
Imaging overlay targets using Moiré elements and rotational symmetry arrangements
KLA CORP1 citations61
US10990022B2Apr 27, 2021
Field-to-field corrections using overlay targets
KLA CORP0 citations57
US11467503B2Oct 11, 2022
Field-to-field corrections using overlay targets
KLA CORP0 citations56