Inventor
STEELY CHRIS
US6 patents
Patents
6 patentsUS11862524B2Jan 2, 2024
Overlay mark design for electron beam overlay
KLA CORP2 citations71
US12055859B2Aug 6, 2024
Overlay mark design for electron beam overlay
KLA CORP0 citations60
US11703767B2Jul 18, 2023
Overlay mark design for electron beam overlay
KLA CORP0 citations58
US10990022B2Apr 27, 2021
Field-to-field corrections using overlay targets
KLA CORP0 citations57
US11467503B2Oct 11, 2022
Field-to-field corrections using overlay targets
KLA CORP0 citations56
US11720031B2Aug 8, 2023
Overlay design for electron beam and scatterometry overlay measurements
KLA CORP0 citations50