Inventor
HOOGKAMP JAN FREDERIK
NL14 patents
Patents
14 patentsUS7359031B2Apr 15, 2008
Lithographic projection assembly, load lock and method for transferring objects
ASML NETHERLANDS BV12 citations80
US7878755B2Feb 1, 2011
Load lock and method for transferring objects
ASML NETHERLANDS BV8 citations79
US7459701B2Dec 2, 2008
Stage apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV12 citations79
US7394520B2Jul 1, 2008
Temperature conditioned load lock, lithographic apparatus comprising such a load lock and method of manufacturing a substrate with such a load lock
ASML NETHERLANDS BV10 citations79
US7486384B2Feb 3, 2009
Lithographic support structure
ASML NETHERLANDS BV11 citations77
US9500953B2Nov 22, 2016
Radiation source
ASML NETHERLANDS BV4 citations71
US7408615B2Aug 5, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations61
US7345736B2Mar 18, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations61
US7123349B2Oct 17, 2006
Lithographic projection assembly, substrate handling apparatus and substrate handling method
ASML NETHERLANDS BV5 citations60
US7576831B2Aug 18, 2009
Method and apparatus for maintaining a machine part
ASML NETHERLANDS BV2 citations58
US7349067B2Mar 25, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations51
US7131999B2Nov 7, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51
US7106420B2Sep 12, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations48
US7394525B2Jul 1, 2008
Exchangeable object handling apparatus, lithographic apparatus including such exchangeable object handling apparatus, and device manufacturing method
ASML NETHERLANDS BV0 citations36