Inventor
JANSEN ALBERT JOHANNES MARIA
NL5 patents
⚠️ This page may combine multiple inventors who share the name “JANSEN ALBERT JOHANNES MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
4 patentsUS7459701B2Dec 2, 2008
Stage apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV12 citations79
US9470988B2Oct 18, 2016
Substrate positioning system, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV10 citations78
US7239370B2Jul 3, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations71
US7423722B2Sep 9, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations46