Inventor
DOU CHUNHUI
JP3 patents
Patents
3 patentsUS11781233B2Oct 10, 2023
Copper oxide solid for use in plating of a substrate, method of producing the copper oxide solid, and apparatus for supplying a plating solution into a plating tank
EBARA CORP0 citations58
US11767606B2Sep 26, 2023
Copper oxide solid for use in plating of a substrate, method of producing the copper oxide solid, and apparatus for supplying a plating solution into a plating tank
EBARA CORP0 citations58
US11230780B2Jan 25, 2022
Copper oxide solid for use in plating of a substrate, method of producing the copper oxide solid, and apparatus for supplying a plating solution into a plating tank
EBARA CORP0 citations58