Inventor
YEH JHAN-HONG
TW7 patents
Patents
7 patentsUS11698591B2Jul 11, 2023
System and method of discharging an EUV mask
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11687011B2Jun 27, 2023
Reticle carrier and associated methods
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11800626B2Oct 24, 2023
Shock wave visualization for extreme ultraviolet plasma optimization
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations71
US11452197B2Sep 20, 2022
Shock wave visualization for extreme ultraviolet plasma optimization
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US12189311B2Jan 7, 2025
Reticle carrier and associated methods
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12114412B2Oct 8, 2024
Shock wave visualization for extreme ultraviolet plasma optimization
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11226564B2Jan 18, 2022
EUV light source and apparatus for lithography
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations60