Inventor
TONG HENRY YEE SHIAN
TW5 patents
Patents
5 patentsUS11800626B2Oct 24, 2023
Shock wave visualization for extreme ultraviolet plasma optimization
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations71
US12114412B2Oct 8, 2024
Shock wave visualization for extreme ultraviolet plasma optimization
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11226564B2Jan 18, 2022
EUV light source and apparatus for lithography
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations60
US11158989B2Oct 26, 2021
Laser source device, extreme ultraviolet lithography device and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US10624196B1Apr 14, 2020
Laser source device and extreme ultraviolet lithography device
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations59