Inventor
SCHAAP PETER
NL4 patents
Patents
4 patentsUS7724351B2May 25, 2010
Lithographic apparatus, device manufacturing method and exchangeable optical element
ASML NETHERLANDS BV12 citations89
US7459701B2Dec 2, 2008
Stage apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV12 citations79
US9983489B2May 29, 2018
Method for compensating for an exposure error, a device manufacturing method, a substrate table, a lithographic apparatus, a control system, a method for measuring reflectivity and a method for measuring a dose of EUV radiation
ASML NETHERLANDS BV5 citations71
US7440076B2Oct 21, 2008
Lithographic apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV5 citations60