Inventor
MIKHAYLICHENKO EKATERINA
US11 patents
Patents
11 patentsUS9984867B2May 29, 2018
Systems and methods for rinsing and drying substrates
APPLIED MATERIALS INC3 citations69
US11289347B2Mar 29, 2022
Non-contact clean module
APPLIED MATERIALS INC2 citations68
US11764069B2Sep 19, 2023
Asymmetry correction via variable relative velocity of a wafer
APPLIED MATERIALS INC0 citations61
US11721563B2Aug 8, 2023
Non-contact clean module
APPLIED MATERIALS INC0 citations57
US12198944B2Jan 14, 2025
Substrate handling in a modular polishing system with single substrate cleaning chambers
APPLIED MATERIALS INC0 citations51
US11942319B2Mar 26, 2024
Pad carrier for horizontal pre-clean module
APPLIED MATERIALS INC0 citations49
US11819976B2Nov 21, 2023
Spray system for slurry reduction during chemical mechanical polishing (cmp)
APPLIED MATERIALS INC0 citations46
US10751738B2Aug 25, 2020
Spray bar design for uniform liquid flow distribution on a substrate
APPLIED MATERIALS INC0 citations45
US12525468B2Jan 13, 2026
Integrated clean and dry module for cleaning a substrate
APPLIED MATERIALS INC0 citations42
US10786885B2Sep 29, 2020
Thin plastic polishing article for CMP applications
APPLIED MATERIALS INC0 citations38
US9859135B2Jan 2, 2018
Substrate rinsing systems and methods
APPLIED MATERIALS INC0 citations38