Inventor
VAN DER WEL ARJAN MARTIN
NL3 patents
Patents
3 patentsUS7459701B2Dec 2, 2008
Stage apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV12 citations79
US7667822B2Feb 23, 2010
Lithographic apparatus and stage apparatus
ASML NETHERLANDS BV6 citations60
US7733463B2Jun 8, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations49