Inventor
LEE JAE SEONG
KR10 patents
⚠️ This page may combine multiple inventors who share the name “LEE JAE SEONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMES CO LTD
3 patentsUS11495467B2Nov 8, 2022
Method and apparatus for etching thin layer
SEMES CO LTD1 citations59
US12575358B2Mar 10, 2026
Flow resistance generating unit and substrate treating apparatus including the same
SEMES CO LTD0 citations48
US11887866B2Jan 30, 2024
Supercritical processing apparatus
SEMES CO LTD0 citations47