P

Inventor

ONISHI YASUNOBU

JP40 patents
⚠️ This page may combine multiple inventors who share the name “ONISHI YASUNOBU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOSHIBA KK

35 patents
US6054254AApr 25, 2000

Composition for underlying film and method of forming a pattern using the film

TOSHIBA KK104 citations98
US6025117AFeb 15, 2000

Method of forming a pattern using polysilane

TOSHIBA KK423 citations98
US6569595B1May 27, 2003

Method of forming a pattern

TOSHIBA KK58 citations96
US5403695AApr 4, 1995

Resist for forming patterns comprising an acid generating compound and a polymer having acid decomposable groups

TOSHIBA KK83 citations96
US5326675AJul 5, 1994

Pattern forming method including the formation of an acidic coating layer on the radiation-sensitive layer

TOSHIBA KK49 citations96
US5198520AMar 30, 1993

Polysilanes, polysiloxanes and silicone resist materials containing these compounds

TOSHIBA KK97 citations96
US5017453AMay 21, 1991

A silicone resist materials containing a polysiloxane and a photo-sensitive agent

TOSHIBA KK81 citations96
US4822716AApr 18, 1989

Polysilanes, Polysiloxanes and silicone resist materials containing these compounds

TOSHIBA KK120 citations96
US5658706AAug 19, 1997

Resist composition for forming a pattern comprising a pyridinium compound as an additive

TOSHIBA KK82 citations95
US5889678AMar 30, 1999

Topography simulation method

TOSHIBA KK32 citations93
US6576562B2Jun 10, 2003

Manufacturing method of semiconductor device using mask pattern having high etching resistance

TOSHIBA KK36 citations92
US6270948B1Aug 7, 2001

Method of forming pattern

TOSHIBA KK54 citations92
USRE35821EJun 9, 1998

Pattern forming method including the formation of an acidic coating layer on the radiation-sensitive layer

TOSHIBA KK23 citations92
US5744281AApr 28, 1998

Resist composition for forming a pattern and method of forming a pattern wherein the composition 4-phenylpyridine as an additive

TOSHIBA KK34 citations92
US5279921AJan 18, 1994

Pattern formation resist and pattern formation method

TOSHIBA KK25 citations92
US5100768AMar 31, 1992

Photosensitive composition

TOSHIBA KK34 citations92
US5063134ANov 5, 1991

Photosensitive composition

TOSHIBA KK27 citations92
US4988601AJan 29, 1991

Photosensitive resin composition with o-quinone diazide and novolac resins prepared from mixed phenolic reactants to include 3,5-xylenol and 2,5-xylenol

TOSHIBA KK36 citations92
US4871646AOct 3, 1989

Polysilane compound and photosensitive composition

TOSHIBA KK24 citations92
US4835193AMay 30, 1989

Photopolymerizable epoxy resin composition

TOSHIBA KK44 citations92
US5580702ADec 3, 1996

Method for forming resist patterns

TOSHIBA KK31 citations89
US7319944B2Jan 15, 2008

Method for a predicting a pattern shape by using an actual measured dissolution rate of a photosensitive resist

TOSHIBA KK11 citations84
US7026099B2Apr 11, 2006

Pattern forming method and method for manufacturing semiconductor device

TOSHIBA KK12 citations84
US6806021B2Oct 19, 2004

Method for forming a pattern and method of manufacturing semiconductor device

TOSHIBA KK13 citations84
US6703181B1Mar 9, 2004

Photosensitive composition having uniform concentration distribution of components and pattern formation method using the same

TOSHIBA KK17 citations84
US6225033B1May 1, 2001

Method of forming a resist pattern

TOSHIBA KK9 citations74
US5994007ANov 30, 1999

Pattern forming method utilizing first insulative and then conductive overlayer and underlayer

TOSHIBA KK9 citations74
US6420271B2Jul 16, 2002

Method of forming a pattern

TOSHIBA KK8 citations73
US4828958AMay 9, 1989

Photosensitive composition and method of forming a resist pattern with copolymer of polyvinyl phenol

TOSHIBA KK12 citations73
US7687227B2Mar 30, 2010

Resist pattern forming method and manufacturing method of semiconductor device

TOSHIBA KK3 citations63
US5091282AFeb 25, 1992

Alkali soluble phenol polymer photosensitive composition

TOSHIBA KK4 citations63
US7198886B2Apr 3, 2007

Method for forming pattern

TOSHIBA KK3 citations62
US7300884B2Nov 27, 2007

Pattern forming method, underlayer film forming composition, and method of manufacturing semiconductor device

TOSHIBA KK0 citations52
US7968272B2Jun 28, 2011

Semiconductor device manufacturing method to form resist pattern

TOSHIBA KK0 citations42
US7794922B2Sep 14, 2010

Pattern forming method and method of manufacturing semiconductor device

TOSHIBA KK0 citations42

TOKYO SHIBAURA ELECTRIC CO

5 patents