Inventor
ONISHI YASUNOBU
JP40 patents
⚠️ This page may combine multiple inventors who share the name “ONISHI YASUNOBU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
35 patentsUS6054254AApr 25, 2000
Composition for underlying film and method of forming a pattern using the film
TOSHIBA KK104 citations98
US6025117AFeb 15, 2000
Method of forming a pattern using polysilane
TOSHIBA KK423 citations98
US6569595B1May 27, 2003
Method of forming a pattern
TOSHIBA KK58 citations96
US5403695AApr 4, 1995
Resist for forming patterns comprising an acid generating compound and a polymer having acid decomposable groups
TOSHIBA KK83 citations96
US5326675AJul 5, 1994
Pattern forming method including the formation of an acidic coating layer on the radiation-sensitive layer
TOSHIBA KK49 citations96
US5198520AMar 30, 1993
Polysilanes, polysiloxanes and silicone resist materials containing these compounds
TOSHIBA KK97 citations96
US5017453AMay 21, 1991
A silicone resist materials containing a polysiloxane and a photo-sensitive agent
TOSHIBA KK81 citations96
US4822716AApr 18, 1989
Polysilanes, Polysiloxanes and silicone resist materials containing these compounds
TOSHIBA KK120 citations96
US5658706AAug 19, 1997
Resist composition for forming a pattern comprising a pyridinium compound as an additive
TOSHIBA KK82 citations95
US5889678AMar 30, 1999
Topography simulation method
TOSHIBA KK32 citations93
US6576562B2Jun 10, 2003
Manufacturing method of semiconductor device using mask pattern having high etching resistance
TOSHIBA KK36 citations92
US6270948B1Aug 7, 2001
Method of forming pattern
TOSHIBA KK54 citations92
USRE35821EJun 9, 1998
Pattern forming method including the formation of an acidic coating layer on the radiation-sensitive layer
TOSHIBA KK23 citations92
US5744281AApr 28, 1998
Resist composition for forming a pattern and method of forming a pattern wherein the composition 4-phenylpyridine as an additive
TOSHIBA KK34 citations92
US5279921AJan 18, 1994
Pattern formation resist and pattern formation method
TOSHIBA KK25 citations92
US5100768AMar 31, 1992
Photosensitive composition
TOSHIBA KK34 citations92
US5063134ANov 5, 1991
Photosensitive composition
TOSHIBA KK27 citations92
US4988601AJan 29, 1991
Photosensitive resin composition with o-quinone diazide and novolac resins prepared from mixed phenolic reactants to include 3,5-xylenol and 2,5-xylenol
TOSHIBA KK36 citations92
US4871646AOct 3, 1989
Polysilane compound and photosensitive composition
TOSHIBA KK24 citations92
US4835193AMay 30, 1989
Photopolymerizable epoxy resin composition
TOSHIBA KK44 citations92
US5580702ADec 3, 1996
Method for forming resist patterns
TOSHIBA KK31 citations89
US7319944B2Jan 15, 2008
Method for a predicting a pattern shape by using an actual measured dissolution rate of a photosensitive resist
TOSHIBA KK11 citations84
US7026099B2Apr 11, 2006
Pattern forming method and method for manufacturing semiconductor device
TOSHIBA KK12 citations84
US6806021B2Oct 19, 2004
Method for forming a pattern and method of manufacturing semiconductor device
TOSHIBA KK13 citations84
US6703181B1Mar 9, 2004
Photosensitive composition having uniform concentration distribution of components and pattern formation method using the same
TOSHIBA KK17 citations84
US6225033B1May 1, 2001
Method of forming a resist pattern
TOSHIBA KK9 citations74
US5994007ANov 30, 1999
Pattern forming method utilizing first insulative and then conductive overlayer and underlayer
TOSHIBA KK9 citations74
US6420271B2Jul 16, 2002
Method of forming a pattern
TOSHIBA KK8 citations73
US4828958AMay 9, 1989
Photosensitive composition and method of forming a resist pattern with copolymer of polyvinyl phenol
TOSHIBA KK12 citations73
US7687227B2Mar 30, 2010
Resist pattern forming method and manufacturing method of semiconductor device
TOSHIBA KK3 citations63
US5091282AFeb 25, 1992
Alkali soluble phenol polymer photosensitive composition
TOSHIBA KK4 citations63
US7198886B2Apr 3, 2007
Method for forming pattern
TOSHIBA KK3 citations62
US7300884B2Nov 27, 2007
Pattern forming method, underlayer film forming composition, and method of manufacturing semiconductor device
TOSHIBA KK0 citations52
US7968272B2Jun 28, 2011
Semiconductor device manufacturing method to form resist pattern
TOSHIBA KK0 citations42
US7794922B2Sep 14, 2010
Pattern forming method and method of manufacturing semiconductor device
TOSHIBA KK0 citations42
TOKYO SHIBAURA ELECTRIC CO
5 patentsUS4495042AJan 22, 1985
Photo-curable epoxy resin composition
TOKYO SHIBAURA ELECTRIC CO38 citations93
US4479860AOct 30, 1984
Photo-curable epoxy resin composition
TOKYO SHIBAURA ELECTRIC CO29 citations93
US4666951AMay 19, 1987
Photo-curable epoxy resin composition
TOKYO SHIBAURA ELECTRIC CO15 citations70
US4476290AOct 9, 1984
Photocurable silicon compound composition
TOKYO SHIBAURA ELECTRIC CO4 citations63
US4465752AAug 14, 1984
Organic photoconductive compositions for use in electrophotography
TOKYO SHIBAURA ELECTRIC CO1 citations51